ICPST-37 Program Outline


Change Points of 37th

  • Welcome reception will be held on Monday evening. Organizers invite all the participants to the welcome reception for free.
  • In Japanese session, organizing committee recommend presenters to prepare their slides in English as possible as they can for convenience of oversea participants.


  • Scientific symposia starts in the morning of May 19th till evening of 21st.
  • English is used for presentations at English Symposia and Panel Symposium, “EUV Lithography toward 10 nm and below”.
  • Japanese and English will be used in the Japanese Symposia.
  • Key-note Presentation and Regular Presentation time is 40 min and 20 min, respectively, including discussion except for the notified lectures.
  • A liquid-crystal display (LCD) projector operating with Windows 7-10 compatible PC (Power Point) is available at every room. All the speakers are requested to bring their files in a USB memory to the audio visual assistant of their presentation rooms in advance. The files stored in different media can be transferred to a USB memory.
  • Speakers may connect their own PC (including Macintosh) to projectors when they request.
  • VGA (15 pin) and HDMI (standard) connectors are available at venue. Other connectors must be prepared by the presenter by own responsibility. Laser pointer is available.


Panel Symposium

Panel Symposium will be held in the evening of May 19th, 2020.


SPST Award Ceremony

SPST Award Ceremony will be held in the evening of May 20th, 2020.


Welcome reception

Welcome reception will be held on May 18th 17:00-19:00.



Banquet will be held at 18:00 to 20:00 on May 20th, 2020.


May 18 (Mon)


Get Together

May 19 (Tue)

Opening Ceremony

Plenary Talk

Lunch Time


Panel Symposium

May 20 (Wed)


Lunch Time Session

Award Ceremony


May 21    (Thu)

Session Lunch Time Session

Closing Ceremony